Vigilant RF Lab

 

 

 

RF Lab Software for Plasma Processing Applications

Vigilant RF Lab is the user interface of the Vigilant Power Monitor.

 

It transform your PC into a state of the art RF laboratory for advanced studies, process monitoring, and plasma diagnostics.

  • Power: dissipated power, forward power, reflected power
  • RF Pulses: Average & peak power, Envelopes of power, voltage, and current pulses
  • Voltage & Current: Waveforms, Min, Max, RMS, Peak-to-Peak values
  • Impedance: Module & Phase, Resistance & Reactance, Equivalent circuit, Smith Chart
  • Harmonics analyzer
  • Harmonics datalogging
  • Harmonics during the RF pulses

 

Review of the Vigilant© RF Lab Software (User interface for the Vigilant© Power Monitor)

 

We make a quick review of the Vigilant RF Lab software while making measurements with an ICP discharge.

 

Excitation frequency: 13.56MHz
Gas: Oxygen
Pressure: 30mTorr

Description of the ICP reactor


Measured Parameters

Power

  • Dissipated power
  • Forward power
  • Reflected power

 

Pulsed RF

  • Average & Peak power
  • Power envelope
  • Voltage & Current envelope

 

Voltage & Current

  • Waveforms
  • Min, Max, RMS
  • Peak-to-peak values

 

Impedance

  • Module & Phase
  • Resistance & Reactance
  • Equivalent circuit
  • Smith Chart

 

Harmonics

  • Harmonic analysis
  • Datalogging
  • During pulses

 

Specifications

Operating systems

USB specifications

Windows XP (SP3), Windows Vista, Win7, Win8

Version 2.0 or 3.0


Datasheet

Download
Vigilant RF Lab Datasheet
RF Lab Software for Plasma Processing Applications
VLA Datasheet.pdf
Adobe Acrobat Document 4.4 MB
Download